Product Details

SORTER WITH BARE WAFER STOCKER OPTION BWS600

• A hybrid equipment with a production wafer sorting function and a stocker function by integrating a bare wafer storage area onto a wafer sorter.
• Stores up to 600 wafers.
• Shutter separates the stocker section from the sorter minienvironment.
• High reliability and low particle generation by integrating a dual-arm clean robot.
• High speed transfer made possible by a servo robot and a linear track.
• Wafer-back-side contamination prevented by Edge-Clamp handling.
• 1800-slot and 2700-slot capacity types are also available.