Dry Vacuum Pump

A vacuum pump is a device that removes gas molecules from a sealed volume in order to leave behind a partial vacuum. Dry vacuum pumps were developed specifically for the semiconductor industry, their characteristic being the ability to operate without lubricants, coolant, and sealant, reducing the risk of contamination.

A vacuum pump is a device that removes gas molecules from a sealed volume in order to leave behind a partial vacuum. Dry vacuum pumps were developed specifically for the semiconductor industry, their characteristic being the ability to operate without lubricants, coolant, and sealant, reducing the risk of contamination.