No. 1 Cleanliness:<0.01@0.12µ

No. 1 Reliability: MTBF>1,500hr. with maintenance-free robot

No. 1 Accuracy (Repeatable data
X/Y: +/-0.036mm 3σ)

Product features

• Consist of high speed with minimum space, vibration and noise.
• SEMI M12, T7 and M1.15 compliant.
• It can read on both sides of the wafer. (Top and Reverse side)
• A combination of optical and image processing provides a high resolution for ID recognition.
• Cleanliness is achieved through the usage of Ferro-fluid seal and a fully enclosed drum cover.
• Based on the visible airflow analysis, a pressure separation plate was installed to aid in decreasing particle generation within the transfer area. (Not applicable to all models)
• By using a dual arm robot, wafer exchange on the process stage can take place simultaneously.
• RORZE's new model of controllers is able to provide optimal acceleration/deceleration of the robot.